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Epitaxy of the Group-IV Semiconductors

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This book will provide an introduction to the epitaxy of the group-IV semiconductor materials. It will primarily be of interest to undergraduate and graduate students who are looking for an introdu...
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  • 31 December 2025
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This book will provide an introduction to the epitaxy of the group-IV semiconductor materials. It will primarily be of interest to undergraduate and graduate students who are looking for an introduction to the topic. However, it will also be useful to those who are either involved in research or development of group-IV semiconductor materials and devices. It will cover topics that include the fundamental physics and basic properties of the materials; devices for building material elements; substrates for epitaxy; epitaxy fundamentals; strained and relaxed heteroepitaxy; virtual substrates; selective epitaxy; epitaxial growth techniques; epilayers characterisation techniques; and a brief overview of the current state of the art in epitaxy of various group IV semiconductor materials including silicon, silicon germanium, silicon carbide, diamond and others.
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Price: £60.00
Pages: 200
Publisher: Institute of Physics Publishing
Imprint: Institute of Physics Publishing
Series: IOP ebooks
Publication Date: 31 December 2025
ISBN: 9780750350471
Format: eBook
BISACs:

TECHNOLOGY & ENGINEERING / Materials Science / Thin Films, Surfaces & Interfaces, Materials / States of matter, TECHNOLOGY & ENGINEERING / Electronics / Semiconductors, SCIENCE / Physics / Condensed Matter, Electronic devices and materials, Condensed matter physics (liquid state and solid state physics)

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1) Introduction (5 pages, 3+ figures) 2) Physics and properties of the group-IV semiconductor materials (40+ pages) a. Materials (5 pages, 5+ figures) b. Crystal structure (5 pages, 5+ figures) c. Energy bands (5 pages, 5+ figures) d. Electrical properties (10 pages, 10+ figures) e. Optical properties (5 pages, 5+ figures) f. Thermal properties (5 pages, 5+ figures) g. Mechanical properties (5 pages, 5+ figures) h. Low dimensional systems (5 pages, 3+ figures) 3) Devices building materials elements (5 pages, 5+ figures) 4) Substrates for epitaxy (15 pages, 10+ figures) 5) Epitaxy fundamentals (30+ pages, 20+ figures)) a. Epitaxy (homo and heteroepitaxy) b. Surface steps c. Surface processes d. Incorporation e. Diffusion f. Segregation g. Epitaxial growth modes
h. Doping (5 pages, 3+ figures) 6) Strained and relaxed heteroepitaxy (10 pages, 5+ figures) 7) Virtual substrates (15 pages, 10+ figures) 8) Selective epitaxy (5 pages, 5+ figures) 9) Epitaxial growth techniques (30+ pages) a. MBE (10 pages, 10+ figures) b. CVD (20 pages, 20+ figures) 10) Epilayers characterisation techniques (20 pages, 20+ figures) 11) Silicon epitaxy (10 pages, 10+ figures) 12) Silicon Carbide epitaxy (10 pages, 10+ figures) 13) Silicon Germanium epitaxy (20 pages, 10+ figures) 14) Silicon Carbon epitaxy (5 pages, 5+ figures) 15) Germanium Tin epitaxy (10 pages, 10+ figures) 16) Silicon Germanium Tin epitaxy (5 pages, 5+ figures) 17) Diamond epitaxy (5 pages, 5+ figures) Appendix