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Epitaxy of the Group-IV Semiconductors

TECHNOLOGY & ENGINEERING / Materials Science / Thin Films, Surfaces & Interfaces, Materials / States of matter, TECHNOLOGY & ENGINEERING / Electronics / Semiconductors, SCIENCE / Physics / Condensed Matter, Electronic devices and materials, Condensed matter physics (liquid state and solid state physics)

1) Introduction (5 pages, 3+ figures) 2) Physics and properties of the group-IV semiconductor materials (40+ pages) a. Materials (5 pages, 5+ figures) b. Crystal structure (5 pages, 5+ figures) c. Energy bands (5 pages, 5+ figures) d. Electrical properties (10 pages, 10+ figures) e. Optical properties (5 pages, 5+ figures) f. Thermal properties (5 pages, 5+ figures) g. Mechanical properties (5 pages, 5+ figures) h. Low dimensional systems (5 pages, 3+ figures) 3) Devices building materials elements (5 pages, 5+ figures) 4) Substrates for epitaxy (15 pages, 10+ figures) 5) Epitaxy fundamentals (30+ pages, 20+ figures)) a. Epitaxy (homo and heteroepitaxy) b. Surface steps c. Surface processes d. Incorporation e. Diffusion f. Segregation g. Epitaxial growth modes
h. Doping (5 pages, 3+ figures) 6) Strained and relaxed heteroepitaxy (10 pages, 5+ figures) 7) Virtual substrates (15 pages, 10+ figures) 8) Selective epitaxy (5 pages, 5+ figures) 9) Epitaxial growth techniques (30+ pages) a. MBE (10 pages, 10+ figures) b. CVD (20 pages, 20+ figures) 10) Epilayers characterisation techniques (20 pages, 20+ figures) 11) Silicon epitaxy (10 pages, 10+ figures) 12) Silicon Carbide epitaxy (10 pages, 10+ figures) 13) Silicon Germanium epitaxy (20 pages, 10+ figures) 14) Silicon Carbon epitaxy (5 pages, 5+ figures) 15) Germanium Tin epitaxy (10 pages, 10+ figures) 16) Silicon Germanium Tin epitaxy (5 pages, 5+ figures) 17) Diamond epitaxy (5 pages, 5+ figures) Appendix